PRODUCT

CO2 Injection & Bubbler





CO2 Injection & Bubbler


Schematic Diagram

Semi-conductor and Display industry require significant amount of deionized water for cleaning process. Dissolved CO2 in the deionized water reduces electric resistance of the surface of wafers and display glasses, which is necessary to reduce the defect rate of the production line. Airrane provides both CO2 injection membrane module and CO2 bubbler device as well.

Key Applications

Ultrapure water for semi-conductor wafer cleaning process
Ultrapure water for semi-conductor wafer cleaning process
Ultrapure water for display glass cleaning process
Ultrapure water for display glass cleaning process
Applications for anti-static treated water required
Applications for anti-static treated water required

Key Applications

Ultrapure water for semi-conductor wafer cleaning process (Scrubber, Lithography, Mask, CMP, Dicing)

Ultrapure water for display glass cleaning process (Mask, Glass Cleaning)

Applications for anti-static treated water requiredDI

AIRRANE Product Specifications

Model

Number

Dimension (mm)
Connection (inch)
DI Water
L
OD
ID
Feed
Retentate
CO2 In / Out
MDB-1004P
50
141
104
1/4"
1/4"
1/4"
0.2~2.0L/m
MDB-1607P
60
218
180
1/2"
1/2"
1/8"
2.0~15L/m
MDB-2108P
76
274
200
1"
1"
1/4"
15~30L/m

Why membrane for CO2 injection and bubbler?

● Airrane is a patent-protected membrane manufacturer

● Fast CO2 dissolution time

● Simple design reduces maintenance requirements

● Real time data transfer system provides user’s convenience

CO2 Injection Membrane / CO2 Bubbler

CO2 Injection Membrane (MDB-2108P)

CO2 BubbIer

Performance Diagram

Head Office

151-5, Gwahaksaneop 4-ro,

Heungdeok-gu, Cheongju-si,

Republic of Korea 

Phone :  +82-43-715-6580 

Fax : +82-43-715-6582

Email : inquiry@airrane.com


Branch Office

5 Gasan digital 1-ro, Geumcheon-gu,

Seoul, Republic of Korea 

Phone : +82-2-6956-6234

Email : nqc@airrane.com


Copyright © AIRRANE all right reserved.

Head Office : 151-5, Gwahaksaneop 4-ro, Heungdeok-gu, Cheongju-si, Republic of Korea

Phone : +82-43-715-6580   |   Fax : +82-43-715-6582   |   Email : inquiry@airrane.com

Branch Office : 5 Gasan digital 1-ro, Geumcheon-gu, Seoul, Republic of Korea

Phone : +82-2-6956-6234   |   Email : nqc@airrane.com

Copyright © AIRRANE all right reserved.